Micromechanical Thermo-fluidic Single-axis Yaw Rate Sensor
نویسندگان
چکیده
This paper reports on the design and analysis of a novel thermal single-axis microelectromechanical gyroscope. The gyroscope consists of a heated, pressure driven liquid flowing in a microchannel and two temperature sensors that detect the temperature difference between the two opposite walls of the channel. When an external rotation is applied, the resulting Coriolis acceleration acting on the fluid induces a transverse temperature gradient that is measured by the temperature sensors. Parametric optimization of the gyroscope performance is investigated using numerical methods. Expected sensor response is derived showing good linearity and a rate resolution of ~0.75 deg/s.
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